![]() Y10T- TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION.Y10- TECHNICAL SUBJECTS COVERED BY FORMER USPC.Y- GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS AND DIGESTS.G02B21/082- Condensers for incident illumination only. ![]() ![]() G02B21/06- Means for illuminating specimens.G02B- OPTICAL ELEMENTS, SYSTEMS OR APPARATUS.G01N21/88- Investigating the presence of flaws or contamination.G01N21/84- Systems specially adapted for particular applications.using sub-millimetre waves, infrared, visible or ultraviolet light G01N21/00- Investigating or analysing materials by the use of optical means, i.e.G01N- INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by MICRO ROBOTEIKUSU SYST Inc, MICRO ROBOTICS SYST Inc filed Critical MICRO ROBOTEIKUSU SYST Inc Publication of JPH01165136A publication Critical patent/JPH01165136A/ja Status Pending legal-status Critical Current Links Original Assignee MICRO ROBOTEIKUSU SYST Inc MICRO ROBOTICS SYST Inc Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Inventor Nilendu Srivastava Fei-Jain Wu Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Pending Application number JP63236649A Other languages English ( en) Google Patents Optical video system device Google Patents JPH01165136A - Optical video system device JPH01165136A - Optical video system device
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